China 'JC/T 2133-2012
' Industry standard english version:
JC
中华人民共和国行业标准
INDUSTRY STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
JC/T 2133-2012
Determination of impurities in silica sol for polishing solution in semiconductor industry. Inductively coupled plasma atomic emission spectrometric method 半导体抛光液用硅溶胶中杂质元素含量的测定 -电感耦合等离子体原子发射光谱法
Issued Date:2012-12-28
Implemented Date:2013-06-01
Issued by:
The Standardization Administration of the People's Republic of China
GB Standard Code
JC/T 2133-2012
Standard Category
China Building Materials
Standards
GB Standard English Title
Determination of impurities in silica sol for polishing solution in semiconductor industry. Inductively coupled plasma atomic emission spectrometric method