GB/T 25915.13-2022
China national
standard english version:
GB
中华人民共和国国家标准
NATIONAL
STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 25915.13-2022
Cleanrooms and related controlled environments - Part 13: Surface cleaning to particle and chemical cleanliness requirements 洁净室及相关受控环境 第13部分:达到粒子和化学洁净度要求的表面清洁
Issued Date:2022/12/30
Implemented Date:2023/7/1
Issued by:
The Standardization Administration of the People's Republic of China