GB/T 41064-2021 China national standard english version:

中华人民共和国国家标准
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 41064-2021

Surface chemical analysis—Depth profiling—Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films
表面化学分析深度剖析用单层和多层薄膜测定X射线光电子能谱、俄歇电子能谱和二次离子质谱中深度剖析溅射速率的方法

Issued Date:2021/12/31

Implemented Date:2022/7/1

Issued by:

The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 41064-2021
Standard Category	China National Standards
GB Standard English Title	Surface chemical analysis—Depth profiling—Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films
GB Standard Chinese Title	表面化学分析深度剖析用单层和多层薄膜测定X射线光电子能谱、俄歇电子能谱和二次离子质谱中深度剖析溅射速率的方法
Chinese Version Price	$5.00 per 1 page
English Translation Fee	$15.00~$30.00 per 1 page
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