GB/T 43493.1-2023
China national
standard english version:
GB
中华人民共和国国家标准
NATIONAL
STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 43493.1-2023
Semiconductor devices - Non-destructive testing and identification criteria for defects in silicon carbide homoepitaxial wafers for power devices - Part 1: Defect classification 半导体器件 功率器件用碳化硅同质外延片缺陷的无损检测识别判据 第1部分:缺陷分类
Issued Date:2023.12.28
Implemented Date:2024.7.1
Issued by:
The Standardization Administration of the People's Republic of China