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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 5226.33-2017 |
Electrical safety of machinary—Electrical equipment of machines—Part 33: Requirements for semiconductor fabrication equipment 机械电气安全 机械电气设备 第33部分：半导体设备技术条件 |
China National Standards Electrical safety machinary—Electrical |
 English PDF |
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