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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 6620-2009 |
Test method for measuring warp on silicon slices by noncontact scanning 硅片翘曲度非接触式测试方法 |
China National Standards noncontact |
 English PDF |
| GB/T 6616-2009 |
Test methods for measuring resistivity of semiconductor wafers or sheet resistance of semiconductor films with a noncontact eddy-current gauge 半导体硅片电阻率及硅薄膜薄层电阻测试方法 非接触涡流法 |
China National Standards noncontact |
English PDF |
| GB/T 19922-2005 |
Standard test methods for measuring site flatness on silicon wafers by noncontact scanning 硅片局部平整度非接触式标准测试方法 |
China National Standards noncontact |
English PDF |
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