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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 17866-1999 |
Guideline for programmed defect masks and benchmark procedures for sensitivity analysisof mask defect inspection systems 掩模缺陷检查系统灵敏度分析所用的特制缺陷掩模和评估测量方法准则 |
China National Standards programmed |
 English PDF |
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