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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 34894-2017 |
Micro-electromechanical system technology—Measuring method for strain gradient measurements of MEMS microstructures using an optical interferometer 微机电系统（MEMS）技术 基于光学干涉的MEMS微结构应变梯度测量方法 |
China National Standards technology—Measuring |
 English PDF |
| GB/T 34900-2017 |
Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures using an optical interferometer 微机电系统（MEMS）技术 基于光学干涉的MEMS微结构残余应变测量方法 |
China National Standards technology—Measuring |
English PDF |
| GB/T 34893-2017 |
Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer 微机电系统（MEMS）技术 基于光学干涉的MEMS微结构面内长度测量方法 |
China National Standards technology—Measuring |
English PDF |
| GB/T 34899-2017 |
Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy 微机电系统（MEMS）技术 基于拉曼光谱法的微结构表面应力测试方法 |
China National Standards technology—Measuring |
English PDF |
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