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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 43894.1-2024 |
Evaluation of near-edge geometry of semiconductor wafers - Part 1: High radial second derivative method (ZDD) {译} 半导体晶片近边缘几何形态评价-第1部分：高度径向二阶导数法（ZDD） |
China National Standards Evaluation near edge |
 English PDF |
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