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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 36053-2018 |
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry—Instrumental requirements, alignment and positioning, data collection, data analysis and reporting X射线反射法测量薄膜的厚度、密度和界面宽度 仪器要求、准直和定位、数据采集、数据分析和报告 |
China National Standards Evaluation thickness, density |
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