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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 15871-1995 |
Hard surface photomask substrates 硬面光掩模基板 |
China National Standards Hard surface photomask |
 English PDF |
| GB/T 15870-1995 |
Chrome thin films for Hard surface photomasks 硬面光掩模用铬薄膜 |
China National Standards Hard surface photomask |
English PDF |
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