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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 42897-2023 |
Microelectromechanical systems (MEMS) technology Silicon-based MEMS nano-thickness film tensile strength test method {译} 微机电系统（MEMS）技术 硅基MEMS纳米厚度膜抗拉强度试验方法 |
China National Standards Micro electromechanical system |
 English PDF |
| GB/T 42896-2023 |
Microelectromechanical systems (MEMS) technology Silicon-based MEMS nanoscale structure impact test method {译} 微机电系统（MEMS）技术 硅基MEMS纳尺度结构冲击试验方法 |
China National Standards Micro electromechanical system |
English PDF |
| GB/T 42895-2023 |
Microelectromechanical systems (MEMS) technology Silicon-based MEMS microstructure bending strength test method {译} 微机电系统（MEMS）技术 硅基MEMS微结构弯曲强度试验方法 |
China National Standards Micro electromechanical system |
English PDF |
| GB/T 38446-2020 |
Micro-electromechanical system technology—Test methods for tensile property measurement of strip thin films 微机电系统（MEMS）技术 带状薄膜抗拉性能的试验方法 |
China National Standards Micro electromechanical system |
English PDF |
| GB/T 38447-2020 |
Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration 微机电系统（MEMS）技术 MEMS结构共振疲劳试验方法 |
China National Standards Micro electromechanical system |
English PDF |
| GB/T 38341-2019 |
Micro-electromechanical system technology—The reliability test methods of MEMS in integrated environments 微机电系统（MEMS）技术 MEMS器件的可靠性综合环境试验方法 |
China National Standards Micro electromechanical system |
English PDF |
| GB/T 34898-2017 |
Micro electromechanical system technology—Test method for the nonlinear vibration of the MEMS resonant sensitive element 微机电系统（MEMS）技术 MEMS谐振敏感元件非线性振动测试方法 |
China National Standards Micro electromechanical system |
English PDF |
| GB/T 34894-2017 |
Micro-electromechanical system technology—Measuring method for strain gradient measurements of MEMS microstructures using an optical interferometer 微机电系统（MEMS）技术 基于光学干涉的MEMS微结构应变梯度测量方法 |
China National Standards Micro electromechanical system |
English PDF |
| GB/T 34900-2017 |
Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures using an optical interferometer 微机电系统（MEMS）技术 基于光学干涉的MEMS微结构残余应变测量方法 |
China National Standards Micro electromechanical system |
English PDF |
| GB/T 34893-2017 |
Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer 微机电系统（MEMS）技术 基于光学干涉的MEMS微结构面内长度测量方法 |
China National Standards Micro electromechanical system |
English PDF |
| GB/T 34899-2017 |
Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy 微机电系统（MEMS）技术 基于拉曼光谱法的微结构表面应力测试方法 |
China National Standards Micro electromechanical system |
English PDF |
| GB/T 26113-2010 |
Micro-electromechanical system technology - General rules for the assessment of micro-geometrical parameters 微机电系统（MEMS）技术 微几何量评定总则 |
China National Standards Micro electromechanical system |
English PDF |
| GB/T 26112-2010 |
Micro-electromechanical system technology - General rules for the assessment of micro-mechanical parameters 微机电系统（MEMS）技术 微机械量评定总则 |
China National Standards Micro electromechanical system |
English PDF |
| GB/T 26111-2010 |
Micro-electromechanical system technology - Terms 微机电系统（MEMS）技术 术语 |
China National Standards Micro electromechanical system |
English PDF |
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