China National Standards

China Microelectromechanical GB Standards List


  •  China "Microelectromechanical" GB Standards List:
  • Standard  Code Standard Title Standard Class Order
    GB/T 42897-2023 Microelectromechanical systems (MEMS) technology Silicon-based MEMS nano-thickness film tensile strength test method {译}
    微机电系统(MEMS)技术 硅基MEMS纳米厚度膜抗拉强度试验方法
    China National Standards
    Microelectromechanical

    English PDF
    GB/T 42896-2023 Microelectromechanical systems (MEMS) technology Silicon-based MEMS nanoscale structure impact test method {译}
    微机电系统(MEMS)技术 硅基MEMS纳尺度结构冲击试验方法
    China National Standards
    Microelectromechanical

    English PDF
    GB/T 42895-2023 Microelectromechanical systems (MEMS) technology Silicon-based MEMS microstructure bending strength test method {译}
    微机电系统(MEMS)技术 硅基MEMS微结构弯曲强度试验方法
    China National Standards
    Microelectromechanical

    English PDF
    GB/T 42709.7-2023 Semiconductor devices Microelectromechanical devices Part 7: MEMS bulk acoustic wave filters and duplexers for radio frequency control and selection {译}
    半导体器件 微电子机械器件 第7部分:用于射频控制和选择的MEMS体声波滤波器和双工器
    China National Standards
    Microelectromechanical

    English PDF
    GB/T 42709.5-2023 Semiconductor devices Microelectromechanical devices Part 5: RF MEMS switches {译}
    半导体器件 微电子机械器件 第5部分:射频MEMS开关
    China National Standards
    Microelectromechanical

    English PDF
    GB/T 41852-2022 Semiconductor devices; Microelectromechanical devices; bending and shearing test methods for bonding strength of MEMS structures {译}
    半导体器件 微机电器件 MEMS结构黏结强度的弯曲和剪切试验方法
    China National Standards
    Microelectromechanical

    English PDF

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