Standard Code | Standard Title | Standard Class | Order |
---|---|---|---|
GB/T 29844-2013 |
Specifications of metrology patterns for the evaluation of advanced photolithgraphy 用于先进集成电路光刻工艺综合评估的图形规范 |
China National Standards Specification metrology pattern |
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GB/T 16878-1997 |
Specification for metrology pattern cells for integrated circuit manufacture 用于集成电路制造技术的检测图形单元规范 |
China National Standards Specification metrology pattern |
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