China National Standards

China Specifications metrology patterns GB Standards List

  •  China "Specifications metrology patterns" GB Standards List:
    • Standard  Code Standard Title Standard Class Order
    GB/T 29844-2013 Specifications of metrology patterns for the evaluation of advanced photolithgraphy
    用于先进集成电路光刻工艺综合评估的图形规范    		 China National Standards
    Specifications metrology patterns
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