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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 14142-2017 |
Test method for crystallographic perfection of epitaxial layers in silicon—Etching technique 硅外延层晶体完整性检验方法 腐蚀法 |
China National Standards Test method crystallographic |
 English PDF |
| GB/T 1554-2009 |
Testing method for crystallographic perfection of silicon by preferential etch techniques 硅晶体完整性化学择优腐蚀检验方法 |
China National Standards Test method crystallographic |
English PDF |
| GB/T 14142-1993 |
Test method for crystallographic perfection of epit-axial layers in silicon by etching techniques 硅外延层晶体完整性检查方法 腐蚀法 |
China National Standards Test method crystallographic |
English PDF |
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