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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 14141-2009 |
Test method for sheet resistance of silicon epitaxial, diffused and ion-implanted layers using a collinear four-probe array 硅外延层、扩散层和离子注入层薄层电阻的测定 直排四探针法 |
China National Standards collinear |
 English PDF |
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