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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 43313-2023 |
Testing of surface quality and microtube density of polished silicon carbide wafers by confocal differential interference method {译} 碳化硅抛光片表面质量和微管密度的测试 共焦点微分干涉法 |
China National Standards microtube |
 English PDF |
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