Standard Code | Standard Title | Standard Class | Order |
---|---|---|---|
GB/T 34178-2017 |
Silica glass substrates for photomask 光掩模石英玻璃基板 |
China National Standards photomask |
English PDF |
GB/T 16880-1997 |
Guidelines for photomask defect classification and size definition 光掩模缺陷分类和尺寸定义的准则 |
China National Standards photomask |
English PDF |
GB/T 16524-1996 |
Specification for registration marks for photomasks 光掩模对准标记规范 |
China National Standards photomask |
English PDF |
GB/T 16523-1996 |
Specification for round quartz photomask substrates 圆形石英玻璃光掩模基板规范 |
China National Standards photomask |
English PDF |
GB/T 15871-1995 |
Hard surface photomask substrates 硬面光掩模基板 |
China National Standards photomask |
English PDF |
GB/T 15870-1995 |
Chrome thin films for hard surface photomasks 硬面光掩模用铬薄膜 |
China National Standards photomask |
English PDF |
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