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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 32280-2022 |
Test method for warp and bow of silicon wafers—Automated non-contact scanning method 硅片翘曲度和弯曲度的测试 自动非接触扫描法 |
China National Standards wafers—Automated |
 English PDF |
| GB/T 32280-2015 |
Test method for warp of silicon wafers—Automated non-contact scanning method 硅片翘曲度测试 自动非接触扫描法 |
China National Standards wafers—Automated |
English PDF |
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