China 'GB/T 10067.417-2023
' standard english version:
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 10067.417-2023
Basic specifications for electrothermal and electromagnetic treatment devices Part 417: Devices for growing silicon carbide single crystals 电热和电磁处理装置基本技术条件 第417部分:碳化硅单晶生长装置
Issued Date:2023/5/23
Implemented Date:2023/12/1
Issued by:
The Standardization Administration of the People's Republic of China