China 'GB/T 20176-2006
' standard english version:
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 20176-2006
Surface chemical analysis-Secondary-ion mass spectrometry-Determination of boron atomic concentration in silicon using uniformly doped materials 表面化学分析 二次离子质谱 用均匀掺杂物质测定硅中硼的原子浓度
Issued Date:2006-03-27
Implemented Date:2006-11-01
Issued by:
The Standardization Administration of the People's Republic of China