China 'GB/T 40110-2021
' standard english version:
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 40110-2021
Surface chemical analysis - Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy 表面化学分析 全反射X射线荧光光谱法(TXRF)测定硅片表面元素污染
Issued Date:2021/5/21
Implemented Date:2021/12/1
Issued by:
The Standardization Administration of the People's Republic of China