China 'GB/T 43748-2024
' standard english version:
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 43748-2024
Microbeam analysis-Transmission electron microscopy-Method for determination of thickness of functional thin film layers in integrated circuit chips 微束分析-透射电子显微术-集成电路芯片中功能薄膜层厚度的测定方法
Issued Date:2024.3.15
Implemented Date:2024.10.1
Issued by:
The Standardization Administration of the People's Republic of China