China 'GB/T 36053-2018
' standard english version:
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 36053-2018
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry—Instrumental requirements, alignment and positioning, data collection, data analysis and reporting X射线反射法测量薄膜的厚度、密度和界面宽度 仪器要求、准直和定位、数据采集、数据分析和报告
Issued Date:2018
Implemented Date:2018
Issued by:
The Standardization Administration of the People's Republic of China
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