China 'GB/T 43493.3-2023
' standard english version:
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 43493.3-2023
Semiconductor devices - Non-destructive testing and identification criteria for defects in silicon carbide homoepitaxial wafers for power devices - Part 3: Photoluminescence detection method of defects 半导体器件 功率器件用碳化硅同质外延片缺陷的无损检测识别判据 第3部分：缺陷的光致发光检测方法
Issued Date:2023.12.28
Implemented Date:2024.7.1
Issued by:
The Standardization Administration of the People's Republic of China
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