China 'GB/T 43661-2024
' standard english version:
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 43661-2024
Surface chemical analysis - Scanning probe microscopy - Definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPM, such as SSRM and SCM) for two-dimensional imaging of dopants, etc. 表面化学分析-扫描探针显微术-用于二维掺杂物成像等用途的电扫描探针显微镜（ESPM，如SSRM和SCM）空间分辨的定义和校准
Issued Date:2024.3.15
Implemented Date:2024.10.1
Issued by:
The Standardization Administration of the People's Republic of China
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