China 'GB/T 44517-2024
' standard english version:
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 44517-2024
Microelectromechanical systems (MEMS) technology - Wafer curvature and cantilever beam deflection test methods for residual stress of MEMS membranes 微机电系统（MEMS）技术-MEMS膜残余应力的晶圆曲率和悬臂梁挠度试验方法
Issued Date:2024/9/29
Implemented Date:2025/4/1
Issued by:
The Standardization Administration of the People's Republic of China
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