China 'GB/T 42158-2023
' standard english version:
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 42158-2023
Micro-Electro-Mechanical Systems (MEMS) Technology-Description and Measurement Methods of Micro-grooves and Pyramidal Needle Structures 微机电系统（MEMS）技术 微沟槽和棱锥式针结构的描述和测量方法
Issued Date:2023/3/17
Implemented Date:2023/7/1
Issued by:
The Standardization Administration of the People's Republic of China
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