China National Standards

China Specification Load Ports Industry Standards English PDF List

  •  China "Specification Load Ports" Industry Standards English PDF List:
    • Standard  Code Standard Title Standard Class Order
    SJ/T 11761-2020 Specification for Load Ports of Semiconductor Equipment for Wafers 200mm and Smaller {译}
    200mm及以下晶圆用半导体设备装载端口规范    		 China Electronics Industry Standards
    Specification Load Ports
    English PDF

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