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GB/T 32816-2016  China national standard english version:

　
GB
中华人民共和国国家标准
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 32816-2016

Silicon-based MEMS fabrication technology—Specification for criterion of the combination of the deep etching and bonding process
硅基MEMS制造技术 以深刻蚀与键合为核心的工艺集成规范
Issued Date:2016-08-29 　 Implemented Date:2017-03-01
Issued by: 　 The Standardization Administration of the People's Republic of China
　

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GB Standard Code GB/T 32816-2016
Standard Category China National Standards
GB Standard English Title Silicon-based MEMS fabrication technology—Specification for criterion of the combination of the deep etching and bonding process
GB Standard Chinese Title 硅基MEMS制造技术 以深刻蚀与键合为核心的工艺集成规范
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English Translation Fee $15.00~$30.00   per 1 page
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