GB/T 42158-2023
China national
standard english version:
GB
中华人民共和国国家标准
NATIONAL
STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 42158-2023
Micro-Electro-Mechanical Systems (MEMS) Technology-Description and Measurement Methods of Micro-grooves and Pyramidal Needle Structures 微机电系统(MEMS)技术 微沟槽和棱锥式针结构的描述和测量方法
Issued Date:2023/3/17
Implemented Date:2023/7/1
Issued by:
The Standardization Administration of the People's Republic of China