GB/T 34894-2017
China national
standard english version:
GB
中华人民共和国国家标准
NATIONAL
STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 34894-2017
Micro-electromechanical system technology—Measuring method for strain gradient measurements of MEMS microstructures using an optical interferometer 微机电系统(MEMS)技术 基于光学干涉的MEMS微结构应变梯度测量方法
Issued Date:2017-11-01
Implemented Date:2018-05-01
Issued by:
The Standardization Administration of the People's Republic of China