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NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 24575-2009

Test method for measuring surface sodium,aluminum,potassium,and iron on silicon and epi substrates by secondary ion mass spectrometry
硅和外延片表面Na、Al、K和Fe的二次离子质谱检测方法
Issued Date:2009-10-30 　 Implemented Date:2010-06-01
Issued by: 　 The Standardization Administration of the People's Republic of China
　

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GB Standard Code GB/T 24575-2009
Standard Category China National Standards
GB Standard English Title Test method for measuring surface sodium,aluminum,potassium,and iron on silicon and epi substrates by secondary ion mass spectrometry
GB Standard Chinese Title 硅和外延片表面Na、Al、K和Fe的二次离子质谱检测方法
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English Translation Fee $15.00~$30.00   per  page
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