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NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 29507-2013

Test method for measuring flatness, thickness and total thickness variation on silicon wafers by automated non-contact scanning
硅片平整度、厚度及总厚度变化测试 自动非接触扫描法
Issued Date:2013-05-09 　 Implemented Date:2014-02-01
Issued by: 　 The Standardization Administration of the People's Republic of China
　

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GB Standard Code GB/T 29507-2013
Standard Category China National Standards
GB Standard English Title Test method for measuring flatness, thickness and total thickness variation on silicon wafers by automated non-contact scanning
GB Standard Chinese Title 硅片平整度、厚度及总厚度变化测试 自动非接触扫描法
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English Translation Fee $15.00~$30.00   per  page
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