China 'GB/T 32999-2016
' standard english version:
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 32999-2016
Surface chemical analysis—Depth profiling—Measurement of sputtering rate: mesh-replica method using a mechanical stylus profilometer 表面化学分析 深度剖析 用机械轮廓仪栅网复型法测量溅射速率
Issued Date:2016-10-13
Implemented Date:2017-09-01
Issued by:
The Standardization Administration of the People's Republic of China