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NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 34893-2017

Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer
微机电系统（MEMS）技术 基于光学干涉的MEMS微结构面内长度测量方法
Issued Date:2017-11-01 　 Implemented Date:2018-05-01
Issued by: 　 The Standardization Administration of the People's Republic of China
　

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GB Standard Code GB/T 34893-2017
Standard Category China National Standards
GB Standard English Title Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer
GB Standard Chinese Title 微机电系统（MEMS）技术 基于光学干涉的MEMS微结构面内长度测量方法
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English Translation Fee $15.00~$30.00   per  page
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  • Relational GB standards of GB/T 34893-2017     Keywords: Micro electromechanical system technology—Measuring method plane length measurements MEMS ...
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