China 'GB/T 34900-2017
' standard english version:
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 34900-2017
Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures using an optical interferometer 微机电系统(MEMS)技术 基于光学干涉的MEMS微结构残余应变测量方法
Issued Date:2017-11-01
Implemented Date:2018-05-01
Issued by:
The Standardization Administration of the People's Republic of China