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 China 'GB/T 6616-2009 ' standard english version:

　

NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 6616-2009

Test methods for measuring resistivity of semiconductor wafers or sheet resistance of semiconductor films with a noncontact eddy-current gauge
半导体硅片电阻率及硅薄膜薄层电阻测试方法 非接触涡流法
Issued Date:2009-10-30 　 Implemented Date:2010-06-01
Issued by: 　 The Standardization Administration of the People's Republic of China
　

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GB Standard Code GB/T 6616-2009
Standard Category China National Standards
GB Standard English Title Test methods for measuring resistivity of semiconductor wafers or sheet resistance of semiconductor films with a noncontact eddy-current gauge
GB Standard Chinese Title 半导体硅片电阻率及硅薄膜薄层电阻测试方法 非接触涡流法
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English Translation Fee $15.00~$30.00   per  page
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